Arrays of microfabricated silicon actuators built in microelectromechanical systems (MEMS) technology can accurately move, position, and orient small objects. The underlying control strategies are based on the theory of programmable vector fields, which is a convenient tool to describe massively parallel, distributed, open-loop manipulation tasks.

This presentation gives an overview of recent work on the theory of programmable vector fields, and also an introduction to MEMS actuator technology. Results from theory and simulation are compared with experimental results. Applications of this technology are presented, including positioning stages for microscopes, and a precision docking system for future "pico-satellites".